JPS62118519U - - Google Patents

Info

Publication number
JPS62118519U
JPS62118519U JP530186U JP530186U JPS62118519U JP S62118519 U JPS62118519 U JP S62118519U JP 530186 U JP530186 U JP 530186U JP 530186 U JP530186 U JP 530186U JP S62118519 U JPS62118519 U JP S62118519U
Authority
JP
Japan
Prior art keywords
photo
pressure oil
vapor pressure
low vapor
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP530186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342038Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP530186U priority Critical patent/JPH0342038Y2/ja
Publication of JPS62118519U publication Critical patent/JPS62118519U/ja
Application granted granted Critical
Publication of JPH0342038Y2 publication Critical patent/JPH0342038Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP530186U 1986-01-17 1986-01-17 Expired JPH0342038Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP530186U JPH0342038Y2 (en]) 1986-01-17 1986-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP530186U JPH0342038Y2 (en]) 1986-01-17 1986-01-17

Publications (2)

Publication Number Publication Date
JPS62118519U true JPS62118519U (en]) 1987-07-28
JPH0342038Y2 JPH0342038Y2 (en]) 1991-09-03

Family

ID=30786755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP530186U Expired JPH0342038Y2 (en]) 1986-01-17 1986-01-17

Country Status (1)

Country Link
JP (1) JPH0342038Y2 (en])

Also Published As

Publication number Publication date
JPH0342038Y2 (en]) 1991-09-03

Similar Documents

Publication Publication Date Title
CA2051554A1 (en) Thin film deposition method
EP0448223A3 (en) Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminum hydride
JPS62118519U (en])
MX7732E (es) Procedimiento para obtener etanol por fermentacion a partir de xilosa
AU2706584A (en) Process for producing ethyl orthosilicates
USD243695S (en) Metal roofing tile
EP0235886A3 (en) Catalyst and its use
JPS5681923A (en) Manufacture of thin film
JPS63149522U (en])
JPS63164214U (en])
USD258075S (en) Gas pressure regulator
JPS62201927U (en])
RU96105179A (ru) Способ химического осаждения тонких пленок диоксида кремния
JPS63140619U (en])
JPS646057U (en])
SU693094A1 (ru) Способ поддерживани оптимального коэффициента избытка воздуха в камере сгорани
JPS52132675A (en) Vapor-phase growth method of thin film
JPH03111561U (en])
JPS6319565U (en])
JPS5933239U (ja) 縦型気相成長装置
JPH0165851U (en])
JPS6139937U (ja) 拡散炉型気相成長装置
JPS6228871U (en])
JPS5298474A (en) Vapor phase growth under reduced pressure
JPS62135434U (en])